PECVD Components

PLASMA SOURCES

For the generation of plasmas different types of plasma sources are used. Starting with the simple DC discharge, over RF-ECR or microwave sources there are many possibilities to generate a plasma. robeko – offers a wide range of different types for different applications.

PECVD KOMPONENTEN | Microwave Plasma Source
robeko MIRO 200 CI | Microwave Plasma Source

MIRO 200 CI | Microwave Plasma Source

MIRO 200 CI | Microwave Plasma Source

The MIRO 200 CI.

Datasheet

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sairem AuraWave | ECR Coaxial Plasma Source

sairem AuraWave | ECR Coaxial Plasma Source

sairem AuraWave | ECR Coaxial Plasma Source

Aura-Wave has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure – range of 10-3 mbar.

Datasheet

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PLASMA SOURCES

For the generation of plasmas different types of plasma sources are used. Starting with the simple DC discharge, over RF-ECR or microwave sources there are many possibilities to generate a plasma. robeko – offers a wide range of different types for different applications.

robeko MIRO 200 CI | Microwave Plasma Source

MIRO 200 CI | Microwave Plasma Source

MIRO 200 CI | Microwave Plasma Source

The MIRO 200 CI.

Datasheet

BUY online

sairem AuraWave | ECR Coaxial Plasma Source

sairem AuraWave | ECR Coaxial Plasma Source

sairem AuraWave | ECR Coaxial Plasma Source

Aura-Wave has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure – range of 10-3 mbar.

Datasheet

BUY online

PECVD KOMPONENTEN | Microwave Plasma Source

PLASMA
SOURCES

For the generation of plasmas different types of plasma sources are used. Starting with the simple DC discharge, over RF-ECR or microwave sources there are many possibilities to generate a plasma. robeko – offers a wide range of different types for different applications.

robeko MIRO 200 CI | Microwave Plasma Source

MIRO 200 CI | Microwave Plasma Source

MIRO 200 CI | Microwave Plasma Source

The MIRO 200 CI.

Datasheet

BUY online

sairem AuraWave | ECR Coaxial Plasma Source

sairem AuraWave | ECR Coaxial Plasma Source

sairem AuraWave | ECR Coaxial Plasma Source

Aura-Wave has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure – range of 10-3 mbar.

Datasheet

BUY online

PECVD KOMPONENTEN | Microwave Plasma Source

PLASMA MONITORING &
PROCESS CONTROL

Process control is essential in industrial plasma applications to ensure reliability and high quality. The EMICON system is a plasma monitoring system based on optical emission spectroscopy that allows real-time analysis, optimization and control of the processes in your plasma application.

PLASUS | Plasma Monitoring & Process Control
PLASUS | EMICON MC

EMICON MC | Plasma Monitor and Process Control System

EMICON MC | Plasma Monitor and Process Control System

The EMICON MC systems are qualified for most applications in plasma technology for analyzing the plasma, for optimizing the process, for plasma monitoring, for quality control and for process controlling. The turn-key EMICON MC systems come with all features necessary for monitoring common plasma processes and for communicating via analog and digital outputs with the application control.

Datasheet

BUY online

PLASUS | EMICON SA

EMICON SA | Plasma Monitor and Process Control System

EMICON SA | Plasma Monitor and Process Control System

The EMICON SA systems are especially designed for process control and quality assurance in industrial plants and production lines. The integrated processor unit ensures stand-alone operation in 24/7 mode and easy integration of the EMICON SA system into the system conrol by e.g. LAN or Profibus.

Datasheet

BUY online

PLASUS | EMICON HR

EMICON HR | Plasma Monitor and Process Control System

EMICON HR | Plasma Monitor and Process Control System

The EMICON HR system is a high-resolution spectrometer system and it is especially qualified for detailed spectral plasma analysis and plasma monitoring but also for quality control and process controlling. The single channel EMICON HR system comes with all features necessary for monitoring and anaylzing process plasmas in detail.

Datasheet

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PLASUS | VACUUMOPTICS

VACUUMOPTICS | Optical Components

VACUUMOPTICS | Optical Components

Optical components are the interface between the application process and the detection system: The optics should transfer as much light intensity as possible and it should be flexible and resistant to industrial environments.

Datasheet

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PLASUS | SPECLINE

SPECLINE | Spectral Line Identification

SPECLINE | Spectral Line Identification

PLASUS SpecLine is the most powerful software tool for evaluating your spectral data. The worldwide unique database for atoms and molecules makes line identification fast and easy.

Datasheet

BUY online

PLASMA MONITORING &
PROCESS CONTROL

Die Prozesssteuerung ist bei industriellen Plasmaanwendungen unerlässlich, um Zuverlässigkeit und hohe Qualität zu

Process control is essential in industrial plasma applications to ensure reliability and high quality. The EMICON system is a plasma monitoring system based on optical emission spectroscopy that allows real-time analysis, optimization and control of the processes in your plasma application.

PLASUS | EMICON MC

EMICON MC | Plasma Monitor and Process Control System

EMICON MC | Plasma Monitor and Process Control System

The EMICON MC systems are qualified for most applications in plasma technology for analyzing the plasma, for optimizing the process, for plasma monitoring, for quality control and for process controlling. The turn-key EMICON MC systems come with all features necessary for monitoring common plasma processes and for communicating via analog and digital outputs with the application control.

Datasheet

BUY online

PLASUS | EMICON SA

EMICON SA | Plasma Monitor and Process Control System

EMICON SA | Plasma Monitor and Process Control System

The EMICON SA systems are especially designed for process control and quality assurance in industrial plants and production lines. The integrated processor unit ensures stand-alone operation in 24/7 mode and easy integration of the EMICON SA system into the system conrol by e.g. LAN or Profibus.

Datasheet

BUY online

PLASUS | EMICON HR

EMICON HR | Plasma Monitor and Process Control System

EMICON HR | Plasma Monitor and Process Control System

The EMICON HR system is a high-resolution spectrometer system and it is especially qualified for detailed spectral plasma analysis and plasma monitoring but also for quality control and process controlling. The single channel EMICON HR system comes with all features necessary for monitoring and anaylzing process plasmas in detail.

Datasheet

BUY online

PLASUS | VACUUMOPTICS

VACUUMOPTICS | Optical Components

VACUUMOPTICS | Optical Components

Optical components are the interface between the application process and the detection system: The optics should transfer as much light intensity as possible and it should be flexible and resistant to industrial environments.

Datasheet

BUY online

PLASUS | SPECLINE

SPECLINE | Spectral Line Identification

SPECLINE | Spectral Line Identification

PLASUS SpecLine is the most powerful software tool for evaluating your spectral data. The worldwide unique database for atoms and molecules makes line identification fast and easy.

Datasheet

BUY online

PLASUS | Plasma Monitoring & Process Control

PLASMA MONITORING &
PROCESS CONTROL

Process control is essential in industrial plasma applications to ensure reliability and high quality. The EMICON system is a plasma monitoring system based on optical emission spectroscopy that allows real-time analysis, optimization and control of the processes in your plasma application.

PLASUS | EMICON MC

EMICON MC | Plasma Monitor and Process Control System

EMICON MC | Plasma Monitor and Process Control System

The EMICON MC systems are qualified for most applications in plasma technology for analyzing the plasma, for optimizing the process, for plasma monitoring, for quality control and for process controlling. The turn-key EMICON MC systems come with all features necessary for monitoring common plasma processes and for communicating via analog and digital outputs with the application control.

Datasheet

BUY online

PLASUS | EMICON SA

EMICON SA | Plasma Monitor and Process Control System

EMICON SA | Plasma Monitor and Process Control System

The EMICON SA systems are especially designed for process control and quality assurance in industrial plants and production lines. The integrated processor unit ensures stand-alone operation in 24/7 mode and easy integration of the EMICON SA system into the system conrol by e.g. LAN or Profibus.

Datasheet

BUY online

PLASUS | EMICON HR

EMICON HR | Plasma Monitor and Process Control System

EMICON HR | Plasma Monitor and Process Control System

The EMICON HR system is a high-resolution spectrometer system and it is especially qualified for detailed spectral plasma analysis and plasma monitoring but also for quality control and process controlling. The single channel EMICON HR system comes with all features necessary for monitoring and anaylzing process plasmas in detail.

Datasheet

BUY online

PLASUS | VACUUMOPTICS

VACUUMOPTICS | Optical Components

VACUUMOPTICS | Optical Components

Optical components are the interface between the application process and the detection system: The optics should transfer as much light intensity as possible and it should be flexible and resistant to industrial environments.

Datasheet

BUY online

PLASUS | SPECLINE

SPECLINE | Spectral Line Identification

SPECLINE | Spectral Line Identification

PLASUS SpecLine is the most powerful software tool for evaluating your spectral data. The worldwide unique database for atoms and molecules makes line identification fast and easy.

Datasheet

BUY online

PLASUS | Plasma Monitoring & Process Control

PECVD Components