PECVD-Technology
APPLICATION CENTER
An outstanding unique feature of robeko is the possibility to investigate, test or verify PVD & PECVD processes in our own application center. This can involve the testing of new components, the development of prototype coatings or the testing of new materials. The equipment with corresponding systems up to the inline sputtering system with several stations allow a process control under conditions of industrial series production.
DORO | In-Line Coater
DORO – In-Line Coater:
- Radiant heater -350° C
- DC glow discharge plasma treatment
- AC glow discharge plasma treatment
- SCI Dual Magnetron Plasma Treatment
- 3x PK 750 Magnetrons
- 2x SCI internal mount TC end blocks for 550 mm length dual rotatable targets
- DC, MF, bipolar pulsed and unipolar pulsed power supplies
- Metallic and reactive oxide and nitride coatings
- In-Situ reflectometry measurement
APPLICATION CENTER
An outstanding unique feature of robeko is the possibility to investigate, test or verify PVD & PECVD processes in our own application center. This can involve the testing of new components, the development of prototype coatings or the testing of new materials. The equipment with corresponding systems up to the inline sputtering system with several stations allow a process control under conditions of industrial series production.
DORO | In-Line Coater
DORO – In-Line Coater:
- Radiant heater -350° C
- DC glow discharge plasma treatment
- AC glow discharge plasma treatment
- SCI Dual Magnetron Plasma Treatment
- 3x PK 750 Magnetrons
- 2x SCI internal mount TC end blocks for 550 mm length dual rotatable targets
- DC, MF, bipolar pulsed and unipolar pulsed power supplies
- Metallic and reactive oxide and nitride coatings
- In-Situ reflectometry measurement
APPLICATION
CENTER
CENTER
An outstanding unique feature of robeko is the possibility to investigate, test or verify PVD & PECVD processes in our own application center. This can involve the testing of new components, the development of prototype coatings or the testing of new materials. The equipment with corresponding systems up to the inline sputtering system with several stations allow a process control under conditions of industrial series production.
DORO | In-Line Coater
DORO – In-Line Coater:
- Radiant heater -350° C
- DC glow discharge plasma treatment
- AC glow discharge plasma treatment
- SCI Dual Magnetron Plasma Treatment
- 3x PK 750 Magnetrons
- 2x SCI internal mount TC end blocks for 550 mm length dual rotatable targets
- DC, MF, bipolar pulsed and unipolar pulsed power supplies
- Metallic and reactive oxide and nitride coatings
- In-Situ reflectometry measurement
LAYER DEVELOPMENT
Our R&D department, staffed by 4 scientists with degrees in physics and chemistry, is focused on developing and testing new coating systems for our customers. This is not only about selecting the right materials and layer sequences, but we also support our customers in choosing the right equipment and methods to ensure the optimal result, also in terms of long-term total investment costs. We also support our technology partners in the development of new products that can be tested on our equipment.
LAYER DEVELOPMENT
Our R&D department, staffed by 4 scientists with degrees in physics and chemistry, is focused on developing and testing new coating systems for our customers. This is not only about selecting the right materials and layer sequences, but we also support our customers in choosing the right equipment and methods to ensure the optimal result, also in terms of long-term total investment costs. We also support our technology partners in the development of new products that can be tested on our equipment.
LAYER-
DEVELOPMENT
DEVELOPMENT
Our R&D department, staffed by 4 scientists with degrees in physics and chemistry, is focused on developing and testing new coating systems for our customers. This is not only about selecting the right materials and layer sequences, but we also support our customers in choosing the right equipment and methods to ensure the optimal result, also in terms of long-term total investment costs. We also support our technology partners in the development of new products that can be tested on our equipment.
IMMEDIATE ANALYSIS
In order to be able to evaluate the results obtained in a short time, it is indispensable to have a good basic equipment of laboratory instruments for coating analysis. Fast, direct analyses with professional equipment allow the parameters of the tests carried out to be adjusted at short notice and thus the number of iterations to determine the optimum result in the shortest possible time.
Fischerscope XDAL
The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.
Sentech SE 801
The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.
DEKTAK II A
The Bruker Dektak II A is a tactile profilometer for measuring surface roughness or film thickness on prepared samples.
Tactile profilometers measure the force against a small needle and that is moved lateral to the sample. This force is kept constant by changing the position of that needle via a small piezo in Z direction. The piezo movement is logged and gives a height profile of the sample.
IMMEDIATE ANALYSIS
In order to be able to evaluate the results obtained in a short time, it is indispensable to have a good basic equipment of laboratory instruments for coating analysis. Fast, direct analyses with professional equipment allow the parameters of the tests carried out to be adjusted at short notice and thus the number of iterations to determine the optimum result in the shortest possible time.
Fischerscope XDAL
The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.
Sentech SE 801
The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.
DEKTAK II A
The Bruker Dektak II A is a tactile profilometer for measuring surface roughness or film thickness on prepared samples.
Tactile profilometers measure the force against a small needle and that is moved lateral to the sample. This force is kept constant by changing the position of that needle via a small piezo in Z direction. The piezo movement is logged and gives a height profile of the sample.
IMMEDIATE-
ANALYSIS
ANALYSIS
In order to be able to evaluate the results obtained in a short time, it is indispensable to have a good basic equipment of laboratory instruments for coating analysis. Fast, direct analyses with professional equipment allow the parameters of the tests carried out to be adjusted at short notice and thus the number of iterations to determine the optimum result in the shortest possible time.
Fischerscope XDAL
The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.
Sentech SE 801
The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.
DEKTAK II A
The Bruker Dektak II A is a tactile profilometer for measuring surface roughness or film thickness on prepared samples.
Tactile profilometers measure the force against a small needle and that is moved lateral to the sample. This force is kept constant by changing the position of that needle via a small piezo in Z direction. The piezo movement is logged and gives a height profile of the sample.
