PECVD-Technology

APPLICATION CENTER

An outstanding unique feature of robeko is the possibility to investigate, test or verify PVD & PECVD processes in our own application center. This can involve the testing of new components, the development of prototype coatings or the testing of new materials. The equipment with corresponding systems up to the inline sputtering system with several stations allow a process control under conditions of industrial series production.

robeko | APPLIKATIONSZENTRUM
ERIKA | Batch Coater

ERIKA – Batch Coater

ERIKA | Batch Coater

ERIKA – Batch Coater:

  • DC glow discharge plasma treatment
  • 3x 6″ Magnetrons
  • DC, bipolar pulsed and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings

Datasheet

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DORO | In-Line Coater

DORO – In-Line Coater

DORO | In-Line Coater

DORO – In-Line Coater:

  • Radiant heater -350° C
  • DC glow discharge plasma treatment
  • AC glow discharge plasma treatment
  • SCI Dual Magnetron Plasma Treatment
  • 3x PK 750 Magnetrons
  • 2x SCI internal mount TC end blocks for 550 mm length dual rotatable targets
  • DC, MF, bipolar pulsed and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings
  • In-Situ reflectometry measurement

Datasheet

BUY online

STELLA | Batch & Bulk Ware Coater

STELLA – Batch & Bulk Ware Coater

STELLA | Batch & Bulk Ware Coater

STELLA – Batch & Bulk Ware Coater:

  • AC glow discharge plasma treatment
  • 2x PK 500 Magnetrons
  • DC and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings
  • Bulk ware coating in tumble drum

Datasheet

BUY online

APPLICATION CENTER

An outstanding unique feature of robeko is the possibility to investigate, test or verify PVD & PECVD processes in our own application center. This can involve the testing of new components, the development of prototype coatings or the testing of new materials. The equipment with corresponding systems up to the inline sputtering system with several stations allow a process control under conditions of industrial series production.

ERIKA | Batch Coater

ERIKA – Batch Coater

ERIKA | Batch Coater

ERIKA – Batch Coater:

  • DC glow discharge plasma treatment
  • 3x 6″ Magnetrons
  • DC, bipolar pulsed and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings

Datasheet

BUY online

DORO | In-Line Coater

DORO – In-Line Coater

DORO | In-Line Coater

DORO – In-Line Coater:

  • Radiant heater -350° C
  • DC glow discharge plasma treatment
  • AC glow discharge plasma treatment
  • SCI Dual Magnetron Plasma Treatment
  • 3x PK 750 Magnetrons
  • 2x SCI internal mount TC end blocks for 550 mm length dual rotatable targets
  • DC, MF, bipolar pulsed and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings
  • In-Situ reflectometry measurement

Datasheet

BUY online

STELLA | Batch & Bulk Ware Coater

STELLA – Batch & Bulk Ware Coater

STELLA | Batch & Bulk Ware Coater

STELLA – Batch & Bulk Ware Coater:

  • AC glow discharge plasma treatment
  • 2x PK 500 Magnetrons
  • DC and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings
  • Bulk ware coating in tumble drum

Datasheet

BUY online

robeko | APPLIKATIONSZENTRUM

APPLICATION
CENTER

An outstanding unique feature of robeko is the possibility to investigate, test or verify PVD & PECVD processes in our own application center. This can involve the testing of new components, the development of prototype coatings or the testing of new materials. The equipment with corresponding systems up to the inline sputtering system with several stations allow a process control under conditions of industrial series production.

ERIKA | Batch Coater

ERIKA – Batch Coater

ERIKA | Batch Coater

ERIKA – Batch Coater:

  • DC glow discharge plasma treatment
  • 3x 6″ Magnetrons
  • DC, bipolar pulsed and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings

Datasheet

BUY online

DORO | In-Line Coater

DORO – In-Line Coater

DORO | In-Line Coater

DORO – In-Line Coater:

  • Radiant heater -350° C
  • DC glow discharge plasma treatment
  • AC glow discharge plasma treatment
  • SCI Dual Magnetron Plasma Treatment
  • 3x PK 750 Magnetrons
  • 2x SCI internal mount TC end blocks for 550 mm length dual rotatable targets
  • DC, MF, bipolar pulsed and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings
  • In-Situ reflectometry measurement

Datasheet

BUY online

STELLA | Batch & Bulk Ware Coater

STELLA – Batch & Bulk Ware Coater

STELLA | Batch & Bulk Ware Coater

STELLA – Batch & Bulk Ware Coater:

  • AC glow discharge plasma treatment
  • 2x PK 500 Magnetrons
  • DC and unipolar pulsed power supplies
  • Metallic and reactive oxide and nitride coatings
  • Bulk ware coating in tumble drum

Datasheet

BUY online

robeko | APPLIKATIONSZENTRUM

LAYER DEVELOPMENT

Our R&D department, staffed by 4 scientists with degrees in physics and chemistry, is focused on developing and testing new coating systems for our customers. This is not only about selecting the right materials and layer sequences, but we also support our customers in choosing the right equipment and methods to ensure the optimal result, also in terms of long-term total investment costs. We also support our technology partners in the development of new products that can be tested on our equipment.

robeko | SCHICHTENTWICKLUNG
Titanoxid

Titanoxid

Titanoxid

In Bearbeitung...

Datasheet

BUY online

LAYER DEVELOPMENT

Our R&D department, staffed by 4 scientists with degrees in physics and chemistry, is focused on developing and testing new coating systems for our customers. This is not only about selecting the right materials and layer sequences, but we also support our customers in choosing the right equipment and methods to ensure the optimal result, also in terms of long-term total investment costs. We also support our technology partners in the development of new products that can be tested on our equipment.

Titanoxid

Titanoxid

Titanoxid

In Bearbeitung...

Datasheet

BUY online

robeko | SCHICHTENTWICKLUNG

LAYER-
DEVELOPMENT

Our R&D department, staffed by 4 scientists with degrees in physics and chemistry, is focused on developing and testing new coating systems for our customers. This is not only about selecting the right materials and layer sequences, but we also support our customers in choosing the right equipment and methods to ensure the optimal result, also in terms of long-term total investment costs. We also support our technology partners in the development of new products that can be tested on our equipment.

Titanoxid

Titanoxid

Titanoxid

In Bearbeitung...

Datasheet

BUY online

robeko | SCHICHTENTWICKLUNG

IMMEDIATE ANALYSIS

In order to be able to evaluate the results obtained in a short time, it is indispensable to have a good basic equipment of laboratory instruments for coating analysis. Fast, direct analyses with professional equipment allow the parameters of the tests carried out to be adjusted at short notice and thus the number of iterations to determine the optimum result in the shortest possible time.

robeko | SOFORTANALYSE
Fischerscope XDAL

Fischerscope XDAL

Fischerscope XDAL

The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.

Datasheet

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Sentech SE 801

Sentech SE 801

Sentech SE 801

The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.

Datasheet

BUY online

DEKTAK II A

DEKTAK II A

DEKTAK II A

The Bruker Dektak II A is a tactile profilometer for measuring surface roughness or film thickness on prepared samples.
Tactile profilometers measure the force against a small needle and that is moved lateral to the sample. This force is kept constant by changing the position of that needle via a small piezo in Z direction. The piezo movement is logged and gives a height profile of the sample.

Datasheet

BUY online

IMMEDIATE ANALYSIS

In order to be able to evaluate the results obtained in a short time, it is indispensable to have a good basic equipment of laboratory instruments for coating analysis. Fast, direct analyses with professional equipment allow the parameters of the tests carried out to be adjusted at short notice and thus the number of iterations to determine the optimum result in the shortest possible time.

Fischerscope XDAL

Fischerscope XDAL

Fischerscope XDAL

The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.

Datasheet

BUY online

Sentech SE 801

Sentech SE 801

Sentech SE 801

The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.

Datasheet

BUY online

DEKTAK II A

DEKTAK II A

DEKTAK II A

The Bruker Dektak II A is a tactile profilometer for measuring surface roughness or film thickness on prepared samples.
Tactile profilometers measure the force against a small needle and that is moved lateral to the sample. This force is kept constant by changing the position of that needle via a small piezo in Z direction. The piezo movement is logged and gives a height profile of the sample.

Datasheet

BUY online

robeko | SOFORTANALYSE

IMMEDIATE-
ANALYSIS

In order to be able to evaluate the results obtained in a short time, it is indispensable to have a good basic equipment of laboratory instruments for coating analysis. Fast, direct analyses with professional equipment allow the parameters of the tests carried out to be adjusted at short notice and thus the number of iterations to determine the optimum result in the shortest possible time.

Fischerscope XDAL

Fischerscope XDAL

Fischerscope XDAL

The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.

Datasheet

BUY online

Sentech SE 801

Sentech SE 801

Sentech SE 801

The Fischerscope XDAL is an x-ray fluorescence (XRF) measurement tool for industrial applications. XRF works by exciting the sample material and detecting the characteristic x-ray emission coming from the sample. The collected data can be used to calculate the material composition or the thickness of a multilayer thin film layer stack of a sample. A motorized XYZ unit allows measurement of profiles or x-y film thickness mappings.

Datasheet

BUY online

DEKTAK II A

DEKTAK II A

DEKTAK II A

The Bruker Dektak II A is a tactile profilometer for measuring surface roughness or film thickness on prepared samples.
Tactile profilometers measure the force against a small needle and that is moved lateral to the sample. This force is kept constant by changing the position of that needle via a small piezo in Z direction. The piezo movement is logged and gives a height profile of the sample.

Datasheet

BUY online

robeko | SOFORTANALYSE

PECVD-Technology | robeko GmbH & Co. KG