Komponenten für die Dünnschichttechnik
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Planar sputter magnetrons

robeko provides planar sputter magnetrons for applications such as wear protection, display, glass coating, solar as well as R&D.

Our understanding of the sputtering process, the layout of a suitable magnetic field, as well as production-ready and robust mechanical implementation is based on the success of our products.

The sputter sources are available in round (D = 50mm D = 400 mm) and rectangular (target lengths up to 3800 mm) version. Variants here are external or internal assembly and cantilever.

Common design principles for all our planar sputtering sources are:

  • Large selection of high-efficient magnetic systems, on request process-optimized
  • Magnets are not lying in the cooling water
  • Membrane cooling or directly cooled backing plates
  • Various thread options
  • Robust design with large screws
  • Easy maintenance
  • 3D design