Komponenten für die Dünnschichttechnik
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Cylindrical Sputter Magnetrons

Rohrkathoden (e-cathodes) für Glasbeschichtung

robeko is the exclusive distributor in Central Europe of Sputtering Components, Inc. (SCI), a leading global manufacturer of cylindrical sputtering and components with more than 3000 installations in the areas of operation architectural glass coating, photovoltaic, display and optical coatings.

Benefits of tube cathodes are long life by big laydown and high target yields and lower particle formation than with planar sputtering and better process stability.

The systems of SCI are characterized by a simple and robust and maintenance-friendly design. Basis of the technology is the end block in its different variants as a drop-in and cantilever. Together with sophisticated magnet systems we form integrated sputter sources for direct use in the system and communication with the system controller.