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Komponenten für die Dünnschichttechnik
You are here: Process Components / Reactiv gas controlers

Process gas monitoring and controlling

Since January 2016 robeko represents the German company PLASUS GmbH, located in Mering, close to Augsburg.

PLASUS is a leading manufacturer of spectroscopic plasma monitor systems. Founded 20 years ago, their core competence is the development of turn-key process control systems for industry and R&D applications. Their systems are applied for plasma monitoring, process control, process optimization, quality control and spectroscopic plasma analysis.

Benefit from our long years of experience and leading know-how - we will be at your service and advise you comprehensively for your application!

EMICON MC

 

 

The EMICON MC systems are qualified for most applications in plasma technology for analyzing the plasma, for optimizing the process, for plasma monitoring, for quality control and for process controlling. The turn-key EMICON MC systems come with all features necessary for monitoring common plasma processes and for communicating via analog and digital outputs with the application control.

 

The spectral range of 200-1100 nm of the spectrometer units of the EMICON MC systems covers the complete UV-VIS-NIR range. The EMICON MC system can be equipped with up to eight spectrometer channels with no loss regarding speed of data acquisition and data transfer. The complete data communication is managed by a single USB 2.0 line thus enabling the system to carry out control tasks even with a notebook computer.

The EMICON software provides extensive new features especially for plasma monitoring, plasma analysis and process control: recipe manager, arithmetic of spectra, automatic, replay of saved data, scaling of response curve and much more.

EMICON SA

 

 

The EMICON SA systems are especially designed for process control and quality assurance in industrial plants and production lines. The integrated processor unit ensures stand-alone operation in 24/7 mode and easy integration of the EMICON SA system into the system conrol by e.g. LAN or Profibus.

 

The spectral range of 200-1100 nm of the spectrometer units of the EMICON SA systems covers the complete UV-VIS-NIR range. The EMICON SA system can be equipped with up to eight spectrometer channels. In addition several voltage inputs are available to take in signal from external sensors such as lambda probes or target voltage. The sytem can easily be accessed and configured by the EMICON SA Manger software via LAN-interface and LAN and Profibus interfacaes are available for system integration.
The EMICON SA system software provides extensive features especially for plasma monitoring and process control: recipe manager, arithmetic of spectra, automatic, replay of saved data, scaling of response curve and much more.

EMICON HR

 

 

 The EMICON HR system is a high-resolution spectrometer system and it is especially qualified for detailed spectral plasma analysis and plasma monitoring but also for quality control and process controlling. The single channel EMICON HR system comes with all features necessary for monitoring and anaylzing process plasmas in detail.

 

The spectral range of 200-860 nm of the EMICON HR system covers the important parts of the UV-VIS-NIR region. Due to the 10 times better spectral resolution of the EMICON HR system compared to the standard systems neighboring atomic lines or rotational and vibrational lines of molecular bands can be resolved easily. The compact design without any moving parts and the USB 2.0 data transfer makes the EMICON HR system a very mobile system which can be used easily at many applications.
The EMICON software provides extensive features especially for spectral analysis, for plasma analysis and plasma monitoring: arithmetic of spectra, replay of saved data, recipe manager and much more.