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Komponenten für die Dünnschichttechnik
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Microwave plasma source

robeko offers a microwave plasma source developed at the Karlsruhe Institute of Technology (KIT).

The main feature of the plasma source is a parabolic reflector with which the microwave power is irradiated into the process chamber. Important features of the source are:  

  • Working pressure identical to sputtering presses
  • Very low ionic energies: 2eV - 10eV
  • High ion current densities of 1mA / cm2 even at a distance of 250 mm

The source PVD / PECVD hybrid processes be possible, which will allow, among other things, the high-rate deposition of carbon-based wear-resistant nanocomposites.The microwave plasma sources are currently available as circular sources with a flange diameter of 200 mm. The performance classes are 1, 2 and 3 kW.

Further information is provided in this data sheet: MIRO-200-CI