RoBeKo, Komponenten für Dünnschichttechnik
Matching Network Options: Available on:
Pulse Detector (PD)

Enables Automatic Tuning when Using a pulsed RF Source.

 AT6, AT3, AT10, AT20, AT30
Low Pass Filter (LPF)

Prevents system harmonics from being sent back to the RF generator

 AT3, AT6, AT10, AT20, AT30
3 Switched RF Outputs (3X)

13.56 MHz 10A @ 4.5KV Peak
13.56 MHz 17A @ 8KV Peak

 AT3, AT6, MM3 Series and MM6 Series
Custom Configurations Available
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Rolf Schäfer Beschichtungskomponenten
Ackerwiese 14
D-67728 Münchweiler		 Tel.: +49/6302-609275
Fax: +49/6302-6090195
e-mail: info@robeko.de